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Semiconductor metrology
Holographic Microscopy
Fiber Endoscopy
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Semiconductor Metrology
01
비침습 광학 이미징 방법을 통한 실리콘 기판 결함 측정
02
1 um 이하의 광학 분해능
03
자동 초점/기울어짐 보정
04
광범위(stiching) 이미징
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